Maybe my knowledge is short on this, but I have seen Light Sabers, laser guns, some fancy torpedoes against star ships, archaic weapons, but not a single weapon of mass destruction, even on dark side, except the Death Star.
Did anybody in Star Wars universe use weapons of mass destruction, be they nuclear, chemical, or any other kind, other than the Death Star?
Adding up some precision by phantom42's comment: I am looking for mentioning weapons which are able to destroy cities, continents, or wipe out the population by millions. I am sure if the dark side didn't have problems using the Death Star, then they would use these weapons if they existed in the Star Wars universe.